TGV 장비
Laser 응용장비
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Model |
TGV |
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Spec |
System Configuration : Laser / Optics / Stage Materials size : <500 X 500, <1t Stage Position Accuracy : 10/20/30/50/100 W Linear Stage Flatness : ≤±15nm Factory Vibration : VC-B Option : Loading & Unloading 
<TGV Sample Images> |
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Application |
For semiconductor substrate |
Suitable material |
Glass |